simultaneous correlative light and electron microscopy(English)

• integrated microscope where the objective lens is positioned in the vacuum chamber of a SEM, directly underneath the sample, with the electron and optical axes aligned parallel to each other and normal to the substrate from opposite sides. The distance between both axes is typically controlled to within 10 µm. Better axial alignment, down to 1 µm, can in principle be achieved but is not necessary as the electron axis can be shifted over the remaining distance electronically using the beam deflectors in the SEM column
• CLEM, EM, SEM
• Microscopy
• https://doi.org…ne.0055707.g001