There are multiple definitions:
extreme ultraviolet(English)
- microlithography technology shows rapid development. A CO2-Sn-laser produced plasma EUV light source has been developed, which may be a promising solution for a 13.5 nm high-power light source for high-volume manufacturing with EUV lithography
- EUVL, HVM, UV, CD, NA
- Laser technique, Engineering aspects, Photonics
- https://doi.org…53632-7.00608-0
- http://dx.doi.o…C.2023.10234175
excreted urinary volume(English)
expected utility value(English)